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Semiconductor Integration Materials LaboratorySIM Lab

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Tailoring Surface Properties via Functionalized Hydrofluorinated Graphene Compounds

Jangyup Son, Nikita Buzov, Sihan Chen, Dongchul Sung, Huije Ryu, Junyoung Kwon, SunPhil Kim, Jingwei Xu, Suklyun Hong, William P. King, Gwan-Hyoung Lee, Arend Van Der Zande*

Tailoring Surface Properties via Functionalized Hydrofluorinated Graphene Compounds

Atomically-precise Graphene Etch Stops for 3D Integrated Systems from 2D Material Heterostructures

Jangyup Son†, Junyoung Kwon†, SunPhil Kim, Yinchuan Lv, Jaehyung Yu, Jong-Young Lee, Huije Ryu, Kenji Watanabe, Takashi Taniguchi, Rita Garrido-Menacho, Nadya Mason, Elif Ertekin, Pinshane Y. Huang, Gwan-Hyoung Lee*, Arend Van Der Zande*

Atomically-precise Graphene Etch Stops for 3D Integrated Systems from 2D Material Heterostructures

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