EOT-scaled 2D FETs on embedded bottom gates using direct channel growth on 200 mm wafers

Huije Ryu, Min Seok Yoo, Alum Jung, Minsu Seol, Baekwon Park, Eun-Kyu Lee, Eunji Yang, Junyoung Kwon, Joung Eun Yoo, Taejin Choi, Kyung-Eun Byun, Changhyun Kim*
December 2025
PDF DOI
Type
Conference paper
Publication
2025 IEEE International Electron Devices Meeting (IEDM), San Francisco, CA, USA (2025)