Atomically-precise Graphene Etch Stops for 3D Integrated Systems from 2D Material Heterostructures

Jangyup Son†, Junyoung Kwon†, SunPhil Kim, Yinchuan Lv, Jaehyung Yu, Jong-Young Lee, Huije Ryu, Kenji Watanabe, Takashi Taniguchi, Rita Garrido-Menacho, Nadya Mason, Elif Ertekin, Pinshane Y. Huang, Gwan-Hyoung Lee*, Arend Van Der Zande*

September 2018

Type

Journal article

Publication

Nature Communications 9, 3988 (2018) — Highlighted by Nature Research Device and Materials Engineering, Yonsei Press, and Donga Science